ISP Thiết bị SEM SS-300 Series
IM-300 is a model designed to place and transport large-scaled
samples freely and observe surface images at high magnification easily.
This is the highest standard model among the models produced by ISP.
Install either a tungsten filament or LaB6 filament according to your needs.
Extend your chamber configuration with a variety of different functions
according to your analysis conditions.
This can be done by modifying some functions related to the chamber
and stage to suit your purpose of analysis and sample
size/characteristics before supplying the product to you.
Specification
| SS-300 SERIES | ||
|---|---|---|
| MODELTYPE | SS-300-SA | SS-300-DA |
| Ⅰ. Major Features | ||
| 1Detector | SE | SE+BSE |
| 2Stage System (Storke) | X,Y(50㎜), R(360˚), Z (0~60㎜), Tilt(-20~90˚) 5-axis Manual |
X,Y(50㎜), R(360˚), Z (0~60㎜), Tilt(-20~90˚) 5-axis Motorized |
| 3Resolution | 3nm | |
| 4Accelerating Voltage | 0.5~30kV | |
| 5Magnifications | 10x~300,000x | |
| 6Maximum Sample Size | 140㎜(D) x 60㎜(H) | |
| Ⅱ. Electron Optics | ||
| 1Electron Gun | Tungsten(W) Filament | |
| 2Aperture(O.L) | Variable Type (30/50/50/100㎛) | |
| 3Beam Shift | X.Y 100㎛ (±50) | |
| Ⅲ. Image System | ||
| 1Image Diplay | 22inch LCD | |
| 2Image Fomat | BMP,JPEG,PNG,TIFF | |
| 3OS | Windows10 | |
| 4Scan Mode | 320×240,640×480,1280×960,2560×1280,5120×3840 | |
| 5Automation Function | Auto Focus, Contrast&Brightness, Stigmator, Gun Align(by gou align coil) | |
| Ⅴ. Vacuum | ||
| 1Vacuum mode | High Vacuum | High+Low Vacuum |
| 2Pump System | Initial Vacuum : Rotary(100L), High Vacuum : Turbo Molecular(80L) / Full Automation |
|
| Ⅵ. Dimensions | ||
| 1SEM | 746(W)x696(D)x1411㎜, 250kg | |
| 2Rotary Pump | 400(W)x160(D)x340(H)㎜, 24kg | |
| Ⅶ. Additional | ||
| 1SEM | CCD CAMERA(Navigation mode), Chamber CAMERA, Analysis Joystick Controller | |
| 2Option | EDS, WDS, EBSD, CL(Cathodoluminescent) Image, Cooling Stage, STEM Detector |
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